Improvement of MoS2 Film Quality by Solid-Phase Crystallization from PVD Amorphous MoSx Film

Publication Information

Title

Japanese:
English:	Improvement of MoS2 Film Quality by Solid-Phase Crystallization from PVD Amorphous MoSx Film

Author

Japanese:	小野凌, 今井慎也, 川那子高暢, 宗田伊理也, 角嶋邦之, 筒井一生, 辰巳哲也, 冨谷茂隆, 若林整.
English:	Ryo Ono, Shinya Imai, Takamasa Kawanago, Iriya Muneta, Kuniyuki Kakushima, Kazuo Tsutsui, Tetsuya Tatsumi, Shigetaka Tomiya, Hitoshi Wakabayashi.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 9, 2023

Publisher

Japanese:
English:

Conference name

Japanese:
English:	IEEE Electron Devices Technology and Manufacturing Conference (EDTM)

Conference site

Japanese:
English:	Seoul

Official URL

DOI