Chemical states of PVD-ZrS2 film underneath scaled high-k film with self-oxidized ZrO2 film as interfacial layer

Publication Information

Title

Japanese:
English:	Chemical states of PVD-ZrS2 film underneath scaled high-k film with self-oxidized ZrO2 film as interfacial layer

Author

Japanese:	大友将樹, 濱田昌也, 小野凌, 宗田伊理也, 角嶋邦之, 筒井一生, 若林整.
English:	Masaki Otomo, Masaya Hamada, Ryo Ono, Iriya Muneta, Kuniyuki Kakushima, Kazuo Tsutsui, Hitoshi Wakabayashi.

Language

English

Journal/Book name

Japanese:
English:	Japanese Journal of Applied Physics

Volume, Number, Page

Vol. 62 p. SC1015

Published date

Jan. 9, 2023

Publisher

Japanese:
English:	IOP Publishing

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI