希土類酸化物キャッピングによるY:HfO2キャパシタの信頼性改善

Publication Information

Title

Japanese:	希土類酸化物キャッピングによるY:HfO2キャパシタの信頼性改善
English:

Author

Japanese:	水谷一翔, 星井拓也, 川那子高暢, 宗田伊理也, 若林整, 筒井一生, 角嶋邦之.
English:	Kazuto Mizutani, Takuya Hoshii, Takamasa Kawanago, Iriya Muneta, Hitoshi Wakabayashi, KAZUO TSUTSUI, Kuniyuki KAKUSHIMA.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 21, 2022

Publisher

Japanese:
English:

Conference name

Japanese:	第83回応用物理学会秋季学術講演会
English:	83th JSAP Autumn meeting

Conference site

Japanese:	仙台市
English: