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Publication Information
Title
Japanese:
MoS2膜質のスパッタ成膜レート依存性調査
English:
Author
Japanese:
今井 慎也
,
小野 凌
,
宗田 伊理也
,
角嶋 邦之
,
辰巳 哲也
,
冨谷 茂隆
,
筒井 一生
,
若林 整
.
English:
Shinya Imai
,
Riyo Ono
,
Iriya Muneta
,
Kuniyuki KAKUSHIMA
,
Tetsuya Tatsumi
,
Shigetaka Tomiya
,
KAZUO TSUTSUI
,
Hitoshi Wakabayashi
.
Language
Japanese
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
Sept. 21, 2022
Publisher
Japanese:
English:
Conference name
Japanese:
第83回応用物理学会秋季学術講演会
English:
83th JSAP Autumn meeting
Conference site
Japanese:
仙台市
English:
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Tokyo Institute of Technology All rights reserved.