MoS2膜質のスパッタ成膜レート依存性調査

Publication Information

Title

Japanese:	MoS2膜質のスパッタ成膜レート依存性調査
English:

Author

Japanese:	今井慎也, 小野凌, 宗田伊理也, 角嶋邦之, 辰巳哲也, 冨谷茂隆, 筒井一生, 若林整.
English:	Shinya Imai, Riyo Ono, Iriya Muneta, Kuniyuki KAKUSHIMA, Tetsuya Tatsumi, Shigetaka Tomiya, KAZUO TSUTSUI, Hitoshi Wakabayashi.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 21, 2022

Publisher

Japanese:
English:

Conference name

Japanese:	第83回応用物理学会秋季学術講演会
English:	83th JSAP Autumn meeting

Conference site

Japanese:	仙台市
English: