微結晶MoS2膜への硫黄雰囲気アニールによる結晶性向上

Publication Information

Title

Japanese:	微結晶MoS2膜への硫黄雰囲気アニールによる結晶性向上
English:

Author

Japanese:	小野凌, 今井慎也, 宗田伊理也, 角嶋邦之, 筒井一生, 若林整.
English:	Riyo Ono, Shinya Imai, Iriya Muneta, Kuniyuki KAKUSHIMA, KAZUO TSUTSUI, Hitoshi Wakabayashi.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 21, 2022

Publisher

Japanese:
English:

Conference name

Japanese:	第83回応用物理学会秋季学術講演会
English:	83th JSAP Autumn meeting

Conference site

Japanese:	仙台市
English: