Fabrication of highly-oriented β-Ga2O3 thin film on ZnO/AlOx-buffered cyclo-olefin polymer substrate by excimer laser annealing at room temperature

Publication Information

Title

Japanese:
English:	Fabrication of highly-oriented β-Ga2O3 thin film on ZnO/AlOx-buffered cyclo-olefin polymer substrate by excimer laser annealing at room temperature

Author

Japanese:	甲斐稜也, 大賀友瑛, 渡邉一樹, 金子智, 松田晃史, 吉本護.
English:	Ryoya Kai, Tomoaki Oga, Kazuki Watanabe, Satoru Kaneko, Akifumi Matsuda, Mamoru Yoshimoto.

Language

English

Journal/Book name

Japanese:
English:	Japanese Journal of Applied Physics

Volume, Number, Page

Vol. 62 No. 4

Published date

Apr. 26, 2023

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI