Observation of Negative Piezoelectricity in HfO2-Based Thin-Film Capacitors

Publication Information

Title

Japanese:
English:	Observation of Negative Piezoelectricity in HfO2-Based Thin-Film Capacitors

Author

Japanese:	Pratyush P. Buragohain, Sangita Dutta, Haidong Lu, Sebastjan Glinsek, Hugo Aramberri, Claudia Richter, Pamenas Kariuki, Terence Mittmann, 三村和仙, 清水荘雄, 舟窪浩, Uwe Schroeder, Emmanuel Defay, Jorge Iniguez, Alexei Gruverman.
English:	Pratyush P. Buragohain, Sangita Dutta, Haidong Lu, Sebastjan Glinsek, Hugo Aramberri, Claudia Richter, Pamenas Kariuki, Terence Mittmann, Takanori Mimura, Takao Shimizu, Hiroshi Funakubo, Uwe Schroeder, Emmanuel Defay, Jorge Iniguez, Alexei Gruverman.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

May 23, 2022

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2022 MRS Spring Meeting & Exhibit

Conference site

Japanese:
English:	Honolulu, Hawai’i