Impurity Analysis of Electroplated Gold Components with Multi-Layered Structures by Thermal Desorption Spectrometry toward Application in Gold Micro Electro Mechanical System Capacitive Accelerometers

Publication Information

Title

Japanese:
English:	Impurity Analysis of Electroplated Gold Components with Multi-Layered Structures by Thermal Desorption Spectrometry toward Application in Gold Micro Electro Mechanical System Capacitive Accelerometers

Author

Japanese:	秋山拓海, 栗岡智行, 陳君怡, Chang Tso-Fu Mark, CHAKRABORTY P, 町田克之, 伊藤浩之, 三宅美博, 曽根正人.
English:	Takumi Akiyama, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone.

Language

English

Journal/Book name

Japanese:
English:	Micro and Nano Engineering

Volume, Number, Page

Vol. 21 p. 100226

Published date

Sept. 4, 2023

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI