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Publication Information
Title
Japanese:
エッチホールを有するAu錘構造のMEMS加速度センサの減衰定数簡易解析モデルの検討
English:
Study of simplified analytical damping constant model of Au MEMS capacitive accelerometer with perforated proof-mass structure
Author
Japanese:
御宿 希祐
,
大西哲
,
TENNETIDEVI
,
CHAKRABORTYP
,
町田克之
,
飯田慎一
,
小西敏文
,
曽根正人
,
三宅美博
,
伊藤浩之
.
English:
Kisuke Miyado
,
Akira Onishi
,
Devi.Srujana Tenneti
,
Parthojit CHAKRABORTY
,
Katsuyuki Machida
,
Shinichi Iida
,
Toshifumi Konishi
,
Masato Sone
,
Yoshihiro Miyake
,
Hiroyuki Ito
.
Language
Japanese
Journal/Book name
Japanese:
第83回応用物理学会秋季学術講演会
English:
Volume, Number, Page
22a-A406-2
Published date
Sept. 22, 2022
Publisher
Japanese:
English:
Conference name
Japanese:
第83回応用物理学会秋季学術講演会
English:
Conference site
Japanese:
宮城
English:
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Tokyo Institute of Technology All rights reserved.