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Title
Japanese:FCVA 法による ta-C 膜の3Dコーティン グ（炭素イオンの入射挙動が膜に及ぼす影響評価） 
English: 
Author
Japanese: 為野悠人, 平田祐樹, 石川功, 赤坂大樹, 大竹尚登, 松岡広成.  
English: 為野悠人, Yuki Hirata, 石川功, Hiroki Akasaka, NAOTO OHTAKE, 松岡広成.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date May 2023 
Publisher
Japanese: 
English: 
Conference name
Japanese:トライボロジー会議2023 春 東京 
English: 
Conference site
Japanese: 
English: 

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