Japanese
Home
Search
Horizontal Search
Publication Search
( Advanced Search )
Patent Search
( Advanced Search )
Research Highlight Search
( Advanced Search )
Researcher Search
Search by Organization
Support
FAQ
T2R2 User Registration
Doctoral thesis registration
Support/Contact
About T2R2
What's T2R2?
Operation Guidance
Leaflets
About file disclosure
Related Links
Tokyo Tech
STAR Search
NII IR Program
Home
>
Help
Publication Information
Title
Japanese:
English:
Design Technique of Serpentine Spring with Half Edge Span Beam Length for High Sensitivity Gold Proof-mass MEMS Capacitive Accelerometer
Author
Japanese:
御宿 希祐
,
TENNETIDEVI
,
大西哲
,
町田克之
,
栗岡智行
,
CHAKRABORTYP
,
Tso-Fu Mark Chang
,
曽根正人
,
三宅美博
,
伊藤浩之
.
English:
御宿 希祐Kisuke Miyado
,
Devi.Srujana Tenneti
,
Akira Onishi
,
Katsuyuki Machida
,
Tomoyuki Kurioka
,
Parthojit CHAKRABORTY
,
Tso-Fu Mark Chang
,
Masato Sone
,
Yoshihiro Miyake
,
Hiroyuki Ito
.
Language
English
Journal/Book name
Japanese:
English:
Extended Abstracts of the 2023 International Conference on Solid State Devices and Materials, Nagoya, 2023, pp325-326 G-2-02
Volume, Number, Page
Published date
Sept. 2023
Publisher
Japanese:
English:
Conference name
Japanese:
English:
2023 International Conference on Solid State Devices and Materials
Conference site
Japanese:
English:
Aichi
Official URL
https://www.ssdm.jp/index.html
©2007
Tokyo Institute of Technology All rights reserved.