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Publication Information
Title
Japanese:
Au積層メタル技術によるMEMSデバイスの九十九折ばね定数ばらつき抑制の検討
English:
Supression of process variation of serpentine spring constant for MEMS devices by gold multi-layer metal technology
Author
Japanese:
御宿 希祐
,
大西 哲
,
Devi Srujana Tenneti
,
町田 克之
,
栗岡智行
,
CHAKRABORTYP
,
Tso-Fu Mark Chang
,
曽根正人
,
三宅美博
,
伊藤浩之
.
English:
Kisuke Miyado
,
Akira Onishi
,
Devi.Srujana Tenneti
,
Katsuyuki Machida
,
Tomoyuki Kurioka
,
Parthojit CHAKRABORTY
,
Tso-Fu Mark Chang
,
Masato Sone
,
Yoshihiro Miyake
,
Hiroyuki Ito
.
Language
Japanese
Journal/Book name
Japanese:
第84回応用物理学会秋季学術講演会 講演予稿集
English:
Volume, Number, Page
Vol. 20p-B201-1
Published date
Sept. 19, 2023
Publisher
Japanese:
English:
Conference name
Japanese:
第84回応用物理学会秋季学術講演会
English:
Conference site
Japanese:
熊本県
English:
©2007
Tokyo Institute of Technology All rights reserved.