Cerium oxide capping on Y-doped HfO2 films for ferroelectric phase stabilization with endurance improvement

Publication Information

Title

Japanese:	Cerium oxide capping on Y-doped HfO2 films for ferroelectric phase stabilization with endurance improvement
English:	Cerium oxide capping on Y-doped HfO2 films for ferroelectric phase stabilization with endurance improvement

Author

Japanese:	Kazuto Mizutani, 星井拓也, Hitoshi Wakabayashi, Kazuo Tsutsui, Edward Y. Chang, Kuniyuki Kakushima.
English:	Kazuto Mizutani, Takuya Hoshii, Hitoshi Wakabayashi, Kazuo Tsutsui, Edward Y. Chang, Kuniyuki Kakushima.

Language

English

Journal/Book name

Japanese:	Japanese Journal of Applied Physics
English:	Japanese Journal of Applied Physics

Volume, Number, Page

Published date

Feb. 1, 2022

Publisher

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English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI