Atomic layer deposition of Y2O3 thin films with a high growth per cycle by Ar multiple boost injection

Publication Information

Title

Japanese:	Atomic layer deposition of Y2O3 thin films with a high growth per cycle by Ar multiple boost injection
English:	Atomic layer deposition of Y2O3 thin films with a high growth per cycle by Ar multiple boost injection

Author

Japanese:	Jinhan Song, Y. Lin, T. Hoshii, H. Wakabayashi, K. Tsutsui, K. Kakushima, 星井拓也.
English:	Jinhan Song, Y. Lin, T. Hoshii, H. Wakabayashi, K. Tsutsui, K. Kakushima, Takuya Hoshii.

Language

English

Journal/Book name

Japanese:	Japanese Journal of Applied Physics
English:	Japanese Journal of Applied Physics

Volume, Number, Page

Published date

July 1, 2020

Publisher

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English:

Conference name

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Conference site

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English:

Official URL

DOI