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Publication Information
Title
Japanese:
English:
Fabrication of CoFeB–SiO2 Films With Large Uniaxial Anisotropy by Facing Target Sputtering and its Application to High-Frequency Planar-Type Spiral Inductors
Author
Japanese:
高村 陽太
,
仁田 帆南
,
河原 和馬
,
金子 忠幸
,
石戸 亮祐
,
宮﨑 達也
,
細田 尚揮
,
藤﨑 敬介
,
中川 茂樹
.
English:
Y. Takamura
,
H. Nitta
,
K. Kawahara
,
T. Kaneko
,
R. Ishido
,
T. Miyazaki
,
N. Hosoda
,
K. Fujisaki
,
S. Nakagawa
.
Language
English
Journal/Book name
Japanese:
English:
IEEE Transactions on Magnetics
Volume, Number, Page
Vol. 59 Issue 11 pp. 1-4
Published date
July 6, 2023
Publisher
Japanese:
English:
IEEE
Conference name
Japanese:
English:
Conference site
Japanese:
English:
File
Official URL
https://ieeexplore.ieee.org/document/10175053
DOI
https://doi.org/10.1109/TMAG.2023.3291879
©2007
Institute of Science Tokyo All rights reserved.