Tomographic Diagnosis of Plasma Parameters of ICP Discharge by Optical Emission Spectroscopy Measurement Assisted with Collisional-radiative Model

Publication Information

Title

Japanese:
English:	Tomographic Diagnosis of Plasma Parameters of ICP Discharge by Optical Emission Spectroscopy Measurement Assisted with Collisional-radiative Model

Author

Japanese:	赤塚洋.
English:	Hiroshi Akatsuka.

Language

English

Journal/Book name

Japanese:
English:	E-Abstract book of AEPSE 2023

Volume, Number, Page

p. 17

Published date

Nov. 5, 2023

Publisher

Japanese:
English:	International Program Committee of AEPSE2023

Conference name

Japanese:
English:	The 13th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2023)

Conference site

Japanese:	釜山
English:	Busan

Official URL