Au錘１軸差動型CMOS-MEMS加速度センサのための錘位置制御電極の検討

Publication Information

Title

Japanese:	Au錘１軸差動型CMOS-MEMS加速度センサのための錘位置制御電極の検討
English:	Development of Proof-mass Position Control Electrodes for Au Proof-mass Single-Axis Differential CMOS-MEMS Accelerometer

Author

Japanese:	御宿希祐, 大西哲 Tenneti Devi Srujana 町田克之, TENNETI DEVI, 町田克之, 栗岡智行, Tso-Fu Mark Chang, 曽根正人, 三宅美博, 伊藤浩之.
English:	Kisuke Miyado*, Akira Onishi, Tenneti Devi Srujana, Katsuyuki Machida, Tomoyuki Kurioka, Tso-Fu Mark Chang, Masato Sone, Yoshihiro Miyake, Hiroyuki Ito.

Language

Japanese

Journal/Book name

Japanese:	第15回集積化MEMSシンポジウム論文集
English:

Volume, Number, Page

Vol. 8A2-D-4

Published date

Oct. 31, 2023

Publisher

Japanese:	応用物理学会集積化MEMS技術研究会
English:

Conference name

Japanese:	第15回集積化MEMSシンポジウム
English:

Conference site

Japanese:	熊本県
English: