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Title
Japanese:マリアバン微分を用いたプラズマゆらぎの制御法にむけて 
English:For control method of plasma fluctuation using Malliavin derivative 
Author
Japanese: 島田陽介, 赤塚洋.  
English: Yosuke Shimada, Hiroshi Akatsuka.  
Language Japanese 
Journal/Book name
Japanese:第41回 プラズマプロセシング研究会 プロシーディングス 
English:Proceedings of 41st Symposium on Plasma Processing (SPP-41) 
Volume, Number, Page         pp. 91 - 92
Published date Jan. 19, 2024 
Publisher
Japanese:応用物理学会プラズマエレクトロニクス分科会 
English:Plasma Electronics Division, Japan Society of Applied Physics 
Conference name
Japanese:第41回プラズマプロセシング研究会 
English:The 41st Symposium on Plasma Processing 
Conference site
Japanese:東京 
English:Tokyo 
Official URL https://gakkai-gran.jp/spp41/
 
Abstract In Recent years, non-equilibrium plasma has widely attracted much attention in short-time duration phenomenon. For example, fluctuation of plasma is related to it, and consequently, it has been discussed not only in field of nuclear fusion but also semiconductor etching. Evaluation method has already been proposed using Malliavin derivative for prediction of plasma fluctuation based on collisional-radiative model. When revised Wiener process is applied to analyze change in densities of excited-level populations in short time, asymptotic stability of average two-square and globally stochastic asymptotic stability of equilibrium solution are important for transient behavior of non-equilibrium plasma. By this method, the density fluctuation about transient behavior may be controlled

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