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Title
Japanese:PECVDおよびFCVA成膜法による三次元部材へのDLC成膜と特性評価 
English: 
Author
Japanese: 為野悠人, 平田祐樹.  
English: 為野悠人, Yuki Hirata.  
Language Japanese 
Journal/Book name
Japanese:メカニカル・サーフェス・テック 
English: 
Volume, Number, Page        
Published date Dec. 2023 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 

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