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Title
Japanese: 
English:Warpage Study of the Electrodeposited-Au Micro-Components Having the Ti/Au Multi-layered Structures toward MEMS Applications 
Author
Japanese: 大村 太郎, 栗岡 智行, 陳 君怡, Chang Tso-Fu Mark, 大西 哲, CHAKRABORTY P, 町田 克之, 伊藤 浩之, 三宅 美博, 曽根 正人.  
English: Taro Omura, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Akira Onishi, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki ; Ito, Yoshihiro Miyake, Masato Sone.  
Language English 
Journal/Book name
Japanese: 
English:Journal of The Electrochemical Society 
Volume, Number, Page Vol. 171        p. 032501
Published date Feb. 15, 2024 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 
Official URL https://iopscience.iop.org/article/10.1149/1945-7111/ad2ba9
 
DOI https://doi.org/10.1149/1945-7111/ad2ba9

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