Plasma immersion ion implantation for tunnel oxide passivated contact in silicon solar cell

Publication Information

Title

Japanese:
English:	Plasma immersion ion implantation for tunnel oxide passivated contact in silicon solar cell

Author

Japanese:	山口昇, Ralph Müller, Christian Reichel b, Jan Benick, 宮島晋介.
English:	Noboru Yamaguchi, Ralph Müller, Christian Reichel b, Jan Benick, Shinsuke Miyajima.

Language

English

Journal/Book name

Japanese:
English:	Solar Energy Materials and Solar Cells

Volume, Number, Page

Volume 268 112730

Published date

Feb. 10, 2024

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI