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Title
Japanese:異種材料集積光回路作製に向けたパーティクルフリーリニア型プラズマによるシリコンウェハの処理 
English:Silicon surface treatment by atmospheric linear type particle free plasma for fabrication of heterogeneous material integrated optical circuits 
Author
Japanese: 日原弘喜, 古谷淳之介, 八井田朱音, 沖野晃俊, 西山伸彦.  
English: Koki Hihara, Junnosuke Furuya, Akane Yaida, AKITOSHI OKINO, Nobuhiko Nishiyama.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Mar. 22, 2024 
Publisher
Japanese: 
English: 
Conference name
Japanese:2024年第71回応用物理学会春季学術講演 
English:The 71st JSAP Spring Meeting2024 
Conference site
Japanese:東京都 
English: 

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