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Title
Japanese:OsコーティングによるSU-8膜の梁構造の機械的強度の向上 
English: 
Author
Japanese: 松谷晃宏, 遠西美重, 吉田 桜子.  
English: Akihiro Matsutani, Mie Tohnishi, 吉田 桜子.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page         23p-P05-36
Published date Mar. 2024 
Publisher
Japanese: 
English: 
Conference name
Japanese:2024年第71回応用物理学会春季学術講演会 
English: 
Conference site
Japanese: 
English: 

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