Epitaxial Growth of Ultrawide Bandgap β-(ScxGa1–x)2O3 Films on β-Ga2O3 (100) Substrate by Pulsed-Laser Deposition

Publication Information

Title

Japanese:
English:	Epitaxial Growth of Ultrawide Bandgap β-(ScxGa1–x)2O3 Films on β-Ga2O3 (100) Substrate by Pulsed-Laser Deposition

Author

Japanese:	是石和樹, 相馬拓人, 大友明.
English:	Kazuki Koreishi, Takuto Soma, Akira Ohtomo.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Dec. 2023

Publisher

Japanese:
English:

Conference name

Japanese:
English:	Material Research Meeting 2023 (MRM2023)

Conference site

Japanese:
English:	Kyoto