Achieving High Piezoelectric Performance in Tetragonal (Bi,Na)TiO3-BaTiO3 Films Across a Wide Composition Range for MEMS Applications

Publication Information

Title

Japanese:
English:	Achieving High Piezoelectric Performance in Tetragonal (Bi,Na)TiO3-BaTiO3 Films Across a Wide Composition Range for MEMS Applications

Author

Japanese:	石濱圭佑, 岡本一輝, 舘山明紀, 清水荘雄, Wakiko Yamaoka, Risako Tsurumaru, Shintaro Yoshimura, Yusuke Sato, 舟窪浩.
English:	Keisuke Ishihama, Kazuki Okamoto, Akinori Tateyama, Takao Shimizu, Wakiko Yamaoka, Risako Tsurumaru, Shintaro Yoshimura, Yusuke Sato, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:	ACS Appl. Mater. Interfaces 2024

Volume, Number, Page

vol. 16 pp. 1308−1316

Published date

Dec. 28, 2023

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI