Characterization of Piezoelectric (K, Na)NbO3 Films for MEMS Applications

Publication Information

Title

Japanese:
English:	Characterization of Piezoelectric (K, Na)NbO3 Films for MEMS Applications

Author

Japanese:	舟窪浩, 舘山明紀, 折野裕一郎, 伊東良晴, 白石貴久, 清水荘雄, 黒澤実.
English:	Hiroshi Funakubo, Akinori Tateyama, Yuichiro Orino, Yoshiharu Ito, Takahisa Shiraishi, Takao Shimizu, Minoru Kurosawa.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

June 23, 2023

Publisher

Japanese:
English:

Conference name

Japanese:
English:	ISAF 2023 (IEEE International Symposium on Applications of Ferroelectrics)

Conference site

Japanese:
English:	Cleveland, Ohio