Stabilization and Identification of Ferroelectric HfO2 Thin Films

Publication Information

Title

Japanese:
English:	Stabilization and Identification of Ferroelectric HfO2 Thin Films

Author

Japanese:	舟窪浩, 高橋雄真, 白石貴久, 小寺正徳, 志村礼司郎, 三村和仙, 石濱圭佑, 岡本一輝, Hiroki Moriwake, Ayako Taguchi, 清水荘雄, Yasuhiro Fujii, Akitoshi Koreeda.
English:	Hiroshi Funakubo, Yuma Takahashi, Takahisa Shiraishi, Kodera Masanori, Reijiro Shimura, Takanori Mimura, Keisuke Ishihama, Kazuki Okamoto, Hiroki Moriwake, Ayako Taguchi, Takao Shimizu, Yasuhiro Fujii, Akitoshi Koreeda.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Oct. 23, 2023

Publisher

Japanese:
English:

Conference name

Japanese:
English:	IWDTF2023 (2023 International Workshop on Dielectric Thin Films for Future Electron Devices - Science and Technology)

Conference site

Japanese:
English:	Ishikawa