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Title
Japanese:集積メンブレンレーザのウェハレベル自動計測 
English:Characterization of Integrated Membrane Laser by a Wafer-level Probing System 
Author
Japanese: 堀川剛, 吉田俊, 西山伸彦.  
English: Tsuyoshi Horikawa, Suguru Yoshida, Nobuhiko Nishiyama.  
Language Japanese 
Journal/Book name
Japanese:レーザ・量子エレクトロニクス研究会創立３０周年 記念研究会講演予稿集 
English: 
Volume, Number, Page        
Published date May 28, 2024 
Publisher
Japanese:電子情報通信学会レーザ・量子エレクトロニクス研究会 
English: 
Conference name
Japanese:電子情報通信学会レーザ・量子エレクトロニクス研究会創立３０周年 記念研究会 
English: 
Conference site
Japanese:那覇市 
English: 
Official URL https://www.ieice.org/~lqe/jpn/2024okinawa/
 
Abstract We developed a wafer-level probing system for integrated lasers. High reproducibility was confirmed in automatic continuous measurements of laser intensity-current-voltage characteristics, lasing spectrum, and small signal response for InP-based membrane lasers on a single wafer

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