Orientation Control of {100}-oriented Epitaxial Y-doped HfO2 Thin Films Using Lattice Matching

Publication Information

Title

Japanese:
English:	Orientation Control of {100}-oriented Epitaxial Y-doped HfO2 Thin Films Using Lattice Matching

Author

Japanese:	前川芳輝, 平井浩司, 岡本一輝, 清水荘雄, 舟窪浩.
English:	Yoshiki Maekawa, Koji Hirai, Kazuki Okamoto, Takao Shimizu, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Oct. 23, 2023

Publisher

Japanese:
English:

Conference name

Japanese:
English:	IWDTF2023 (2023 International Workshop on Dielectric Thin Films for Future Electron Devices - Science and Technology)

Conference site

Japanese:
English:	Ishikawa