Chemically tailored block copolymers for highly reliable sub-10-nm patterns by directed self-assembly

Publication Information

Title

Japanese:	Chemically tailored block copolymers for highly reliable sub-10-nm patterns by directed self-assembly
English:	Chemically tailored block copolymers for highly reliable sub-10-nm patterns by directed self-assembly

Author

Japanese:	Shinsuke Maekawa, Takehiro Seshimo, Takahiro Dazai, Kazufumi Sato, 畠山歓, Yuta Nabae, Teruaki Hayakawa.
English:	Shinsuke Maekawa, Takehiro Seshimo, Takahiro Dazai, Kazufumi Sato, Kan Hatakeyama, Yuta Nabae, Teruaki Hayakawa.

Language

English

Journal/Book name

Japanese:	Nature Communications
English:	Nature Communications

Volume, Number, Page

Vol. 15 No. 1 pp. 5671

Published date

July 2024

Publisher

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English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI