Effects of plasma oxidation and plasma nitridation on chemical bonding state of AlScN evaluated by AR-HAXPES

Publication Information

Title

Japanese:
English:	Effects of plasma oxidation and plasma nitridation on chemical bonding state of AlScN evaluated by AR-HAXPES

Author

Japanese:	Tomoya Tsutsumi, Kazuki Goshima, Yoshiharu Kirihara, Tatsuki Okazaki, 保井晃, Mitani Yuichiro, 角嶋邦之, 野平博司.
English:	Tomoya Tsutsumi, Kazuki Goshima, Yoshiharu Kirihara, Tatsuki Okazaki, Akira Yasui, Mitani Yuichiro, Kuniyuki KAKUSHIMA, Hiroshi Nohira.

Language

English

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Published date

Apr. 18, 2024

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