CeO2-HfO2-ZrO2薄膜の結晶構造と強誘電性の評価

Publication Information

Title

Japanese:	CeO2-HfO2-ZrO2薄膜の結晶構造と強誘電性の評価
English:

Author

Japanese:	下野園航平, 前川芳輝, 茶谷那知, 岡本一輝, 山岡和希子, 川島康, 井上ゆか梨, 舟窪浩.
English:	Kohei Shimonosono, Yoshiki Maekawa, Nachi Chaya, Kazuki Okamoto, 山岡和希子, 川島康, 井上ゆか梨, HIROSHI FUNAKUBO.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 22, 2024

Publisher

Japanese:
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Conference name

Japanese:	第71回応用物理学会春季学術講演会
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Conference site

Japanese:	東京都
English: