High-performance a-ITZO TFTs with high bias stability enabled by self-aligned passivation using a-GaOx

Publication Information

Title

Japanese:
English:	High-performance a-ITZO TFTs with high bias stability enabled by self-aligned passivation using a-GaOx

Author

Japanese:	ＳＨＩＹＵＨＡＯ, Shiah Yu-Shien, 沈基亨, 笹瀬雅人, 金正煥, 細野秀雄.
English:	Shi Yuhao, Shiah Yu-Shien, Sim Kihyung, Sasase Masato, Kim Junghwan, Hosono Hideo.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Nov. 2022

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI