Enhancing analysis efficiency: Automation of spectroscopic ellipsometry for crystalline semiconductors and transparent conductive oxides

Publication Information

Title

Japanese:
English:	Enhancing analysis efficiency: Automation of spectroscopic ellipsometry for crystalline semiconductors and transparent conductive oxides

Author

Japanese:	Sara Maeda, Yusuke Tani, Hirotaka Katayama, Daiji Kanematsu, Kohei Oiwake, Yukinori Nishigaki, Tetsuhiko Miyadera, Masayuki Chikamatsu, Takayuki Nagai, 半沢幸太, 平松秀典, Akira Terakawa, 細野秀雄, 相澤拓磨, 藤原裕之.
English:	Sara Maeda, Yusuke Tani, Hirotaka Katayama, Daiji Kanematsu, Kohei Oiwake, Yukinori Nishigaki, Tetsuhiko Miyadera, Masayuki Chikamatsu, Takayuki Nagai, Kota Hanzawa, Hidenori Hiramatsu, Akira Terakawa, Hideo Hosono, Takuma Aizawa, Hiroyuki Fujiwara.

Language

English

Journal/Book name

Japanese:
English:	Thin Solid Films

Volume, Number, Page

Vol. 787 p. 140099

Published date

Dec. 2023

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI