Approach to Low Contact Resistance Formation on Buried Interface in Oxide Thin-Film Transistors: Utilization of Palladium-Mediated Hydrogen Pathway

Publication Information

Title

Japanese:
English:	Approach to Low Contact Resistance Formation on Buried Interface in Oxide Thin-Film Transistors: Utilization of Palladium-Mediated Hydrogen Pathway

Author

Japanese:	ＳＨＩＹＵＨＡＯ, 辻昌武, Cho Hanjun, 上田茂典, 金正煥, 細野秀雄.
English:	Yuhao Shi, Masatake Tsuji, Hanjun Cho, Shigenori Ueda, Junghwan Kim, Hideo Hosono.

Language

English

Journal/Book name

Japanese:
English:	ACS NANO

Volume, Number, Page

Published date

Mar. 2024

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

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English:

DOI