Surface patterning of wide-gap semiconducting β-Ga2O3 thin films by area selective crystallization via room-temperature excimer laser annealing and low toxic wet-etching processes

Publication Information

Title

Japanese:
English:	Surface patterning of wide-gap semiconducting β-Ga2O3 thin films by area selective crystallization via room-temperature excimer laser annealing and low toxic wet-etching processes

Author

Japanese:	塩尻大士, 甲斐稜也, 金子智, 松田晃史, 吉本護.
English:	Daishi Shiojiri, Ryoya Kai, Satoru Kaneko, Akifumi Matsuda, Mamoru Yoshimoto.

Language

English

Journal/Book name

Japanese:
English:	Applied Physics Express

Volume, Number, Page

Volume 18 Number 1

Published date

Jan. 27, 2025

Publisher

Japanese:
English:	IOP Publishing

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI