スパッタＷ膜形成時の内部応力in-situ観測による成長機構解析

Publication Information

Title

Japanese:	スパッタＷ膜形成時の内部応力in-situ観測による成長機構解析
English:	Analysis of growth mechanism using in-situ observation of internal stress during sputter-deposition of W films

Author

Japanese:	中川茂樹, 横澤諒, 飯田大介, 高村陽太, 中光豊, 清田哲司.
English:	Shigeki Nakagawa, Ryo Yokozawa, Daisuke Iida, yota Takamura, Yutaka Nakamitsu, Tetsuji Kiyota.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

16p-K504-10

Published date

Mar. 16, 2025

Publisher

Japanese:
English:

Conference name

Japanese:	2025年第72回応用物理学会春期学術講演会
English:	The 72nd JSAP Spring Meeting 2025

Conference site

Japanese:	千葉
English:	Chiba