Growth of Co thin Films with Low Roughness by ALD for 3D Magnetic Memory

Publication Information

Title

Japanese:
English:	Growth of Co thin Films with Low Roughness by ALD for 3D Magnetic Memory

Author

Japanese:	HU YIFAN, 佐藤虹太, ZHANG RUIXIAN, 石田乾, PHAM NAM HAI.
English:	Y. Hu, K. Sato, R. Zhang, K. Ishida, P. N. Hai.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Feb. 28, 2025

Publisher

Japanese:
English:

Conference name

Japanese:
English:	International Conference of Asian Union of Magnetics Societies (IcAUMS 2025)

Conference site

Japanese:
English:	Okinawa