薄膜化した (Al1-xScx)N膜における結晶性・強誘電特性のSc組成比依存性

Publication Information

Title

Japanese:	薄膜化した (Al1-xScx)N膜における結晶性・強誘電特性のSc組成比依存性
English:	Dependence of crystallinity and ferroelectricity on Sc content in thin (Al1-xScx)N films

Author

Japanese:	道古宗俊, 松井尚子, 入澤寿和, 恒川孝二, Nana Sun, 中村美子, 岡本一輝, 舟窪浩.
English:	Soshun Doko, Naoko Matsui, Toshikazu Irisawa, Koji Tsunekawa, Nana Sun, Yoshiko Nakamura, Kazuki Okamoto, Hiroshi Funakubo.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

15a-K503-4

Published date

Mar. 15, 2025

Publisher

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English:

Conference name

Japanese:	第72回応用物理学会春季学術講演会
English:	The 72nd JSAP Spring Meeting

Conference site

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English: