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Title
Japanese:(Al,Sc)N強誘電体薄膜の結晶構造及び電気特性に及ぼす成膜条件の影響 
English: 
Author
Japanese: 河野駿平, 岡本一輝, 影山壮太郎, 孫納納, 舟窪浩.  
English: Shumpei Kawano, Kazuki Okamoto, Sotaro Kageyama, 孫納納, HIROSHI FUNAKUBO.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Jan. 8, 2025 
Publisher
Japanese: 
English: 
Conference name
Japanese:第63回セラミックス基礎科学討論会 
English: 
Conference site
Japanese:新潟県 新潟市 
English: 

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