AlScN薄膜のITO透明電極上へのエピタキシャル成長と極性のSc量依存性

Publication Information

Title

Japanese:	AlScN薄膜のITO透明電極上へのエピタキシャル成長と極性のSc量依存性
English:

Author

Japanese:	劉センコン, 安部琴子, Yuan Xueyou, 岡本一輝, 舟窪浩, 山田智明.
English:	劉センコン, 安部琴子, Yuan Xueyou, Kazuki Okamoto, HIROSHI FUNAKUBO, Tomoaki Yamada.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 14, 2025

Publisher

Japanese:
English:

Conference name

Japanese:	第72回応用物理学会春季学術講演会
English:

Conference site

Japanese:	千葉県野田市
English: