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Title
Japanese: 
English:Enhanced attractive force via torsion spring as rotatable tip structure in beam-structure electrostatic chucks 
Author
Japanese: 許 三川, 田岡 祐樹, 齋藤 滋規.  
English: Sanchuan Xu, Yuki Taoka, Shigeki Saito.  
Language English 
Journal/Book name
Japanese:Results in Engineering 
English:Results in Engineering 
Volume, Number, Page Vol. 24        pp. 103365
Published date 2024 
Publisher
Japanese:Elsevier 
English:Elsevier 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 

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