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Publication Information
Title
Japanese:
English:
Enhanced attractive force via torsion spring as rotatable tip structure in beam-structure electrostatic chucks
Author
Japanese:
許 三川
,
田岡 祐樹
,
齋藤 滋規
.
English:
Sanchuan Xu
,
Yuki Taoka
,
Shigeki Saito
.
Language
English
Journal/Book name
Japanese:
Results in Engineering
English:
Results in Engineering
Volume, Number, Page
Vol. 24 pp. 103365
Published date
2024
Publisher
Japanese:
Elsevier
English:
Elsevier
Conference name
Japanese:
English:
Conference site
Japanese:
English:
©2007
Institute of Science Tokyo All rights reserved.