Enhanced Attractive Force via Tip Rotatability in Beam-Type Electrostatic Chuck for Advanced Robotic Application

Publication Information

Title

Japanese:
English:	Enhanced Attractive Force via Tip Rotatability in Beam-Type Electrostatic Chuck for Advanced Robotic Application

Author

Japanese:	許三川, 田岡祐樹, 齋藤滋規.
English:	Xu Sanchuan, Yuki Taoka, Shigeki Saito.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Dec. 2024

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2024 MRS Fall Meeting

Conference site

Japanese:
English:	Massachusetts