弾性梁構造由来の柔軟性を持つ静電吸着装置とその真空対応設計・製作及び性能評価

Publication Information

Title

Japanese:	弾性梁構造由来の柔軟性を持つ静電吸着装置とその真空対応設計・製作及び性能評価
English:	Development of an Electrostatic Chuck with a Compliant Beam Structure Using Vacuum- Compatible Materials

Author

Japanese:	後藤亜花里, 田岡祐樹, 齋藤滋規.
English:	Akari Goto, Yuki Taoka, Shigeki Saito.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 2025

Publisher

Japanese:
English:

Conference name

Japanese:	IIP2025 情報・知能・精密機器部門(IIP 部門)講演会
English:

Conference site

Japanese:	山口
English: