集合配列電極型静電チャックにおける電極支持弾性部材の形状が吸着・離脱性能に与える影響

Publication Information

Title

Japanese:	集合配列電極型静電チャックにおける電極支持弾性部材の形状が吸着・離脱性能に与える影響
English:	Effect of Elastic Supporting Component Shape on Adhesion and Detachment Performance in Array-Electrode-Type Electrostatic Chucks

Author

Japanese:	二木結子, 田岡祐樹, 齋藤滋規.
English:	Yuiko Futagi, Yuki Taoka, Shigeki Saito.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 2025

Publisher

Japanese:
English:

Conference name

Japanese:	IIP2025 情報・知能・精密機器部門(IIP 部門)講演会
English:

Conference site

Japanese:	山口
English: