Shape Effect of Elastic Supporting Component in Array-Electrode-Type Electrostatic-Chucks for Next-Generation Semiconductor Fabrication

Publication Information

Title

Japanese:
English:	Shape Effect of Elastic Supporting Component in Array-Electrode-Type Electrostatic-Chucks for Next-Generation Semiconductor Fabrication

Author

Japanese:	二木結子, 田岡祐樹, 齋藤滋規.
English:	Yuiko Futagi, Yuki Taoka, Shigeki Saito.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Apr. 2025

Publisher

Japanese:
English:

Conference name

Japanese:
English:	MRS 2025 Spring

Conference site

Japanese:
English:	Seattle