High Speed Nickel Electrodeposition in a Supercritical CO2 Emulsified Nickel Sulfamate Bath toward MEMS Application

Publication Information

Title

Japanese:
English:	High Speed Nickel Electrodeposition in a Supercritical CO2 Emulsified Nickel Sulfamate Bath toward MEMS Application

Author

Japanese:	侯文鼎, 栗岡智行, 陳君怡, 曽根正人, Chang Tso-Fu Mark.
English:	Wending Hou, Tomoyuki Kurioka, Chun-Yi Chen, Masato Sone, Tso-Fu Mark Chang.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 2025

Publisher

Japanese:
English:

Conference name

Japanese:
English:	51st International Conference on Micro and Nano Engineering (MNE2025)

Conference site

Japanese:
English: