Low Propagation Loss in LPCVD Si3N4 Waveguides Without the Need for High-Temperature Annealing: Expanding Applications in Silicon Photonics

Publication Information

Title

Japanese:
English:	Low Propagation Loss in LPCVD Si3N4 Waveguides Without the Need for High-Temperature Annealing: Expanding Applications in Silicon Photonics

Author

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 15, 2025

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2025 International conference on solid state devices and materials

Conference site

Japanese:
English:	Yokohama