EUVリソグラフィシミュレーション高速化のための CNN学習用カーブリニアマスクパターン生成

Publication Information

Title

Japanese:	EUVリソグラフィシミュレーション高速化のための CNN学習用カーブリニアマスクパターン生成
English:	Curvilinear Mask Pattern Generation for CNN Training to Accelerate EUV Lithography Simulation

Author

Japanese:	杉山萌, 田邊容由, 下田将之, 高橋篤司.
English:	Moe Sugiyama, Hiroyoshi Tanabe, Masayuki Shimoda, Atsushi Takahashi.

Language

Japanese

Journal/Book name

Japanese:	DAシンポジウム2025 論文集
English:	Proc. DA Symposium 2025, IPSJ Symposium Series

Volume, Number, Page

pp. 106-112

Published date

Aug. 2025

Publisher

Japanese:
English:

Conference name

Japanese:
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Conference site

Japanese:
English:

Official URL