Control of the Mechanical Properties of  Multi-layered Ti/Au Micro-sized Components by Electroplating Towards an Ultra-High-Sensitive Inertial Accelerometer

Publication Information

Title

Japanese:
English:	Control of the Mechanical Properties of Multi-layered Ti/Au Micro-sized Components by Electroplating Towards an Ultra-High-Sensitive Inertial Accelerometer

Author

Japanese:	曽根正人, Chang Tso-Fu Mark, 栗岡智行, 陳君怡, 町田克之, 伊藤浩之, 三宅美博.
English:	Masato Sone, Tso-Fu Mark Chang, Tomoyuki Kurioka, Chun-Yi Chen, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Nov. 2025

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2025 MRS-Taiwan Annual Meeting

Conference site

Japanese:
English:	Hsinchu